Formation of Fine Holes and Protrusions on Ti-6Al-4V Alloy by Argon-Ion Sputter-Etching

Fabrication of fine surface textures is one the most effective technologies to provide new functions for materials. In this research, argon-ion sputter-etching was applied an α+β type Ti-6Al-4V alloy placed on a SUS304 steel disk at radio frequency power 200 W, 250 W and 300 0.9 ks 21.6 ks. For 1013 K annealed specimens, holes smaller than 500 nm diameters were densely formed surfaces when sputter time However, increased more 1.8 ks, disappeared groups grain-shaped protrusions in flat areas. 1323 solution-treated also shorter The connected ridge-shaped with increasing finally changed independent uniformly distributed protrusions. Energy dispersive X-ray analyses revealed increase V Fe contents sputtered surface. This corresponds that particles arrived from dissolved into strongly combined atoms, which resulted selective sputtering Al Ti. It considered argon ion radiation has induced decomposition region areas different contents, are by preferential lower